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I0，光束通過離子腔之後，打在樣品，再由樣品後的離子腔偵測穿過樣品後光束剩餘強度It。在It離子腔後，可選擇性加置一參考標準品及另一離子腔Ir，以做為能量校正。實驗時，改變光源之單光器來掃描目標原子的能量範圍，即可以求取各能量位置的吸收度。穿透法的限制在於樣品的濃度，過濃會有自吸收的效應，太稀訊雜比不好也無法分析。
螢光法利用目標原子在吸收光源後躍遷回基態所放出的螢光強度，來判定被吸收光子的量。可用於高濃度粉末或液體形態的樣品。常用的偵檢器為Lytle detector，並以特定濾光片去除光源的影響。測得的螢光光源正比於吸收強度，可以用得到吸收光譜。